Abstract
3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.
