A Study on the Fabrication and the Impedance Matching of SPUDT Type SAW Filter

단상 단방향 형태의 표면탄성파 필터 제작 및 임피던스 정합

  • 유일현 (세명대학교 컴퓨터 응용 과학과)
  • Published : 2005.06.01

Abstract

We have studied to obtain the SAW filter for the Single Phase Unidirectional Transduce. (SPUDT), was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and then we performed computer-simulated by simulator. We can fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulations. Also, we have performed to obtain the properly conditions about impedance matching of the SAW filter for SPUDT. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are 5000A and $3.6{\mu}m$, respectively. And the width of IDT' fingers is $2.4{\mu}m$, and the space between IDT' finger and reflector is $2.0{\mu}m$. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7.7MHz after when we have matched impedance. Also, we could obtain that ripple characteristics is less than 0.4dB and standing wave ratio is probably 1.5 after when we have matched impedance.

단상 단방향 형태의 표면 탄성파 필터 제작하기 위하여 Langasite 기판위에 빗살무늬 변환기를 형성시켜 모의실험을 수행하였으며, 전극재료로는 Al-Cu를 사용하였다. 모의실험을 바탕으로 입력단에는 IDT를 직렬형태로 연결시킨 block 형태로 하중을 가하는 전극 방법을 쓰고 출력단은 withdrawal 형태로 하중을 가하는 방법을 써서 제작하였다. 이를 바탕으로 단상 단방향 형태의 표면 탄성파 필터 적절한 임피던스 정합 조건도 얻고자 하였다. Langasite 기판 위에 형성시킨 입출력 빗살무늬 변환기 전극 수는 50쌍, 두께는 $5000{\AA}$으로 하였으며, 반사기 폭은 $3.6{\mu}m$이며, 전극 폭은 $2.4{\mu}m$이고, 전극과 반사기 사이의 간격은 $2.0{\mu}m$으로 하였다. 제작한 필터의 임피던스 정합 후 주파수 특성에서 중심 주파수는 190MHz, 대역폭은 7.7MHz 정도로 측정되었으며, 리플 특성은 0.4dB 이하이고, 정재파 비는 1.5정도로 측정되었다.

Keywords

References

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