한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제22권7호
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  • Pages.102-111
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  • 2005
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

전자기 구동장치를 이용한 병렬형 6자유도 스테이지의 위치제어

A Position Control for a Parallel Stage with 6 degrees of freedom Using Magnetic Actuators

  • 이세한 (경남대학교 기계자동차공학부)
  • 발행 : 2005.07.01
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초록

In this paper, we address a position control for a parallel stage, which is levitated and driven by electric magnetic force. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal force. A dynamic equation of the stage system is derived based on Newton-Euler method and it's special Jacobian matrix describing a relation between the limited velocity and Cartesian velocity is done. There are proposed two control methods for positioning which are Cartesian space controller and Actuator space controller. The control performance of the Cartesian space controller is better than the Actuator space controller in task space trajectory while the Actuator space controller is simpler than the Cartesian space controller in controller realization.

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참고문헌

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