Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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A Numerical Study on the Thermopneumatic and Flow Characteristics of Diffuser-Nozzle Based Thermopneumatic Micropumps

디퓨져와 노즐을 이용한 열공압형 마이크로 펌프의 열공압 및 유동특성에 관한 수치해석적 연구

  • Jeong Jin (Department of Mechanical Engineering, Kyunghee University) ;
  • Kim Chang Nyung (College of Advanced Technology, Kyunghee University)
  • 정진 (경희대학교 기계공학과) ;
  • 김창녕 (경희대학교 테크노공학대학)
  • Published : 2005.07.01
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Abstract

This study has been conducted to investigate the thermopneumatic and flow characteristics of diffuser/nozzle based thermopneumatic micropumps. In this study, a transient three-dimensional numerical analysis using FSI (Fluid-Structure Interaction) model has been employed to analyze the effects of the interaction between the membrane and two fluids (air and water) in the thermopneumtic micropump. The transient temperature and pressure in the cavity, the transient displacements of the membrane and the net flow rate of the micropump have been closely calculated for the frequency of 1 Hz. It has been found that the difference of the flow rates at the inlet and outlet is larger in the cooling period than in the heating period and that the duty ratio is very important in association with pump performance because the temperature in the cavity ascends drastically in the heating period and descends slowly in the cooling period. This study can be regarded as fundamental understandings for the design and analysis of thermopneumatic micropumps.

Keywords

References

  1. Chang, J. K, Chung, S. and Han, D. C., 2000, Application of bio-MEMS technology on medicine and biology, Journal of the Korean Society of Precision Engineering, Vol. 17, No. 7, pp. 45-51
  2. Lee, S. W. and Yang, S. S., 1998, The fabrication and application of micropump, ICASE, pp.26-32
  3. Patrick, R. S., Wouter, O. and Piet, B., 1994, The design, fabrication, and testing of corrugated silicon nitride diaphragms, Journal of Microelectro Mechanical Systems, Vol. 3, No.1, W 36-42 https://doi.org/10.1109/84.285722
  4. Stemme, E. and Stemme, G., 1993, A valveless diffuser/nozzle-based fluid pump, Sensors and Actuators A, Vol. 39, pp. 159-167 https://doi.org/10.1016/0924-4247(93)80213-Z
  5. Nguyen, N. T. and Huang, X. Y, 2000, Numerical simulation of pulse-width-modulated micropumps with diffuser/nozzle elements, Nanyang Technological University
  6. Nguyen, N. T. and Huang, X. Y, 2001, Miniature valveless pumps based on printed circuit board technique, Sensors and Actuators A, Vol. 88, pp. 104-111 https://doi.org/10.1016/S0924-4247(00)00500-8
  7. Olsson, A, Stemme, G. and Stemme, E., 2000, Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps, Sensors and Actuators A, Vol. 84, pp. 165-175 https://doi.org/10.1016/S0924-4247(99)00320-9
  8. Jeong, O.C. and Yang, S. S., 2000, Fabrication of a thermopneumatic micropump with a aliminum flap valves, Journal of the Korean Physical Society, Vol. 37, No.6, pp. 873-877 https://doi.org/10.3938/jkps.37.873
  9. Van De Pol, F. C. M., Wonnink, D. G.J., Elwenspoek, M. and Fluitman, J. H.J., 1989, A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices, Sensors and Actuators A, Vol.17, pp.139-143 https://doi.org/10.1016/0250-6874(89)80073-3
  10. Schulte, S., Maurer, A and Bungartz, H., 1995, Modular solution approach for simulation of coupled physical phenomena, in Simulation and Design of Microsystems and Microstructures, Computational Mechanics Publications, Southampton, pp. 201-210