JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications

  • Kim, Illh-Wan (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Seok, Seon-Ho (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Kim, Hyeon-Cheol (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Kang, Moon-Koo (School of Electrical Engineering and Computer Sciences Seoul National University) ;
  • Chun, Kuk-Jin (School of Electrical Engineering and Computer Sciences Seoul National University)
  • Published : 2005.03.31
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Abstract

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

Keywords

References

  1. H. Luo, G. Zhang, L. Richard and G. K. Fedder, 'A Post-CMOS Micromachined Lateral Accelerometer,' Journal of Microelectromechanical systems, Vol. 11, No. 3, pp.188-195, June 2002 https://doi.org/10.1109/JMEMS.2002.1007397
  2. J. Chae, H. Kulah and K. Najafi, 'A Monolithic Three-axis Silicon Capacitive Accelerometer with Micro-G Resolution,' The 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, pp.81-84, June 8-12, 2003 https://doi.org/10.1109/SENSOR.2003.1215258
  3. H. Kulah, J. Chae and K. Najafi, 'Noise Analysis and Characterization of a Sigma-Delta Capacitive Silicon Accelerometer,' The 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, USA, pp.95-98, June 8-12, 2003 https://doi.org/10.1109/SENSOR.2003.1215261
  4. N. Yazdi and K. Najafi, 'An All-Silicon Single-Wafer Microg Accelerometer with a Combined Surface and Bulk Micromachining Process,' Journal of Microelectromechanical systems, Vol. 9, No. 4, pp. 544-550, Dec. 2000 https://doi.org/10.1109/84.896777
  5. J. Chae, H. Kulah and K. Najafi, 'An In-plane High-Sensitivity, Low-noise Micro-G Silicon Accelerometer,' IEEE the 6th Annual International Conference on Micro Electro Mechanical System (MEMS'03), Kyoto, Japan, pp.466-469, Jan. 19-23, 2003 https://doi.org/10.1109/MEMSYS.2003.1189787
  6. H. Takao, H. Fukumoto and M. Ishida, 'A CMOS Integrated Three-Axis Accelerometer Fabricated with Commercial Submicrometer CMOS Technology and Bulk-Micromachining,' IEEE Transaction on Electron Devices, Vol. 48, No. 9, pp.1961-1968, Sep. 2001 https://doi.org/10.1109/16.944183
  7. H. Takao, Y. Matsumoto and M. Ishida, 'A Monolithically Integrated Three Axial Accelerometer Using Stress Sensitive CMOS Differential Amplifiers,' The 9th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'97), Chicago, USA, 1997, pp.1173-1176, June 16-19 https://doi.org/10.1109/SENSOR.1997.635414
  8. D. W. Burns, R. D. Horning, W. R. Herb, J. D. Zook, and H. Guckel, 'Resonant microbeam accelerometer,' The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX (Transducers'95), Stockholm, Sweden, 1995, pp.659-662, June 25-29 https://doi.org/10.1109/SENSOR.1995.721918
  9. T. V. Rozhart, H. Jerman, J. Drake, and C. de Cotiis,'An inertial-grade, micromachined vibrating beam accelerometer,' The 8th International Conference on Solid-State Transducers and Actuators, and Eurosensors IX (Transducers'95), Stockholm, Sweden, 1995, pp.656-658, June 25-29 https://doi.org/10.1109/SENSOR.1995.721917
  10. M. Helsel, G. Gassner, M. Robinson and J. Woodruff, 'A Navigation Grade Micro-Machined Silicon Accelerometer,' IEEE Position Location and Navigation Symposium, pp.51-58, April 11-15, 1994 https://doi.org/10.1109/PLANS.1994.303295
  11. R. E. Hopkins, J. T. Borenstein, B. M. Antkowiak, P. A. Ward, R. D. Elliot, M. S. Weinberg, M. D. DePiero, and J. A. Miola, 'The Silicon Oscillating Accelerometer: A MEMS Inertial Instrument for Strategic Missile Guidance,' Missile Sciences Conference, Monterey, CA, pp.44-51, Nov. 7-9, 2000