나노 스테레오리소그래피 공정을 이용한 3차원 극미세 형상제작

Fabrication of Three-dimensional Microstructures using Nano-stereo lithography Process

  • 양동열 (한국과학기술원 기계공학과) ;
  • 박상후 (한국과학기술원 대학원 기계공학과) ;
  • 임태우 (한국과학기술원 대학원 기계공학과)
  • 발행 : 2005.10.01

초록

키워드

참고문헌

  1. Kumar, A., Whitesides, G.M., 'Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol 'ink' followed by chemical etching,' Appl. Phys. Lett., Vol. 63, pp. 2002-2004, 1993 https://doi.org/10.1063/1.110628
  2. Zhao, X.-M., Xia, Y., Whitesides, G.M., 'Fabrication of three-dimensional micro-structures: Microtransfer molding,' Adv. Mater., Vol. 8, pp. 837-840, 1996 https://doi.org/10.1002/adma.19960081016
  3. Kim, E., Xia, Y., Whitesides, G.M., 'Polymer microstructures formed by moulding in capillaries,' Nature, Vol. 376, pp. 581-584, 1995 https://doi.org/10.1038/376581a0
  4. Chou, S.Y., Keimel, C., Gu, J., 'Ultrafast and direct imprint of nanstructures in silicon,' Nature, Vol. 417, No. 20, pp. 835-837, 2002 https://doi.org/10.1038/nature00792
  5. Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Optics letters, Vol.28, No.5, pp.301-303, 2003 https://doi.org/10.1364/OL.28.000301
  6. Kawata, S., Sun, H.B., Tanaka, T., Takada, K., 'Finer features for functional microdevices,' Nature, Vol. 412, No.16, pp.697-698, 2001 https://doi.org/10.1038/35089130
  7. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 'Direct Fabrication of Micro-Patterns and Three-dimensional Structures using Nano Replication Printing (nRP) Process,' Sensors and Materials, Vol.17, No.2, pp.65-75, 2005
  8. Fouassier, J.P., Rabek, J.F., Radiation curing in polymer science and technology -volume III, Polymerization Mechnisms, Elsvier, London, 1993
  9. Lim, T.W., Park, S.H., Yang, D.Y., 'Contour Offset Algorithm (COA) for Precise Patterning in Two-photon Polymerization,' Microelectronic Engineering, Vol.77(3-4), pp.382-388, 2005 https://doi.org/10.1016/j.mee.2005.01.022
  10. Park, S.H., Lim, T.W., Yang, D.Y., Kong, H.J., Lee, K.S., ' A Scheme to Control Laser Power and Exposure Time for Fabricating Precise 3-Dimensional Microstructures using Two-photon Polymerization,' J. Korean Chemical Society, Vol. 49, No. 3, pp.292-299, 2005 https://doi.org/10.5012/jkcs.2005.49.3.292
  11. Park, S.H., Lim, T.W., Lee, S.H., Yang, D.Y., Kong, H.J., Lee, K.S., 'Fabrication of Microstructure using Double Contour Scanning (DCS) Method by Two-photon Polymerization,' Polymer(Korea), Vol. 29, No. 2, pp. 146-150, 2005
  12. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., Lee, K.S., 'Double contour scanning method for enhancing the physical strength of 3D microstructures fabricated using two-photon photopolyrnerization,' Microelectronic Eng., submitted, 2005
  13. Park, S.H., Lee, S.H., Yang, D.Y, Kong, H.J., Lee, K.S., 'Subregional slicing method to increase 3D nanofabrication efficiency In two-photon polymerization,' Appl. Phys. Lett., accepted, 2005 https://doi.org/10.1063/1.2103393
  14. Kato, J., Takeyasu, N., Adachi, Y., Sun, H.B., Kawata, S., 'Multiple-spot parallel processing for laser micronanofabrication,' Appl. Phys. Lett., Vol. 86, pp. 044102(1)-044102(3), 2005 https://doi.org/10.1063/1.1855404
  15. Teh, W.H., Smith, C.G., Guntherodt, H.J., 'SU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication,' Appl. Phys. Lett., Vol. 84, No. 20, pp. 4095-4097, 2004 https://doi.org/10.1063/1.1753059
  16. Seet, K.K., Mizeikis, V.. Matsuo, S., Juodkazis, S., Misawa, H., 'Three-dimensional spiral architecture photonic crystals obtained by direct laser writing,' Adv. Mater., Vol. 17, No. 5, pp. 541-545, 2005 https://doi.org/10.1002/adma.200401527
  17. Duan, X.M., Sun, H.B., Kaneko, K., Kawata, S., 'Two-photon polymerization of metal ions doped acrylate monomers and oligomers for three-dimensional structure fabrication,' Thin Solid Film, Vol. 453-454, pp. 518-521, 2004 https://doi.org/10.1016/j.tsf.2003.11.126
  18. Sun, H.B., Takada, K., Kawata, S., 'Elastic force analysis of functional polymer submicron oscillators,' Appl. Phys. Lett., Vol. 79, No. 19, pp. 3173-3175, 2001 https://doi.org/10.1063/1.1418024