International Journal of Precision Engineering and Manufacturing

  • 제6권4호
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  • Pages.49-54
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  • 2005
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Pulsed Electrochemical Deposition for 3D Micro Structuring

  • Park, Jung-Woo (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Ryu, Shi-Hyoung (Department of Mechanical Engineering, Chonbuk National University) ;
  • Chu, Chong-Nam (School of Mechanical and Aerospace Engineering, Seoul National University)
  • 발행 : 2005.10.01
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초록

In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration, Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M $CuSO_4$ and 0.5 M $H_2SO_4$, The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than $10{\mu}m$ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

키워드

참고문헌

  1. Bard, A. J. and Faulkner, L. R., 'Electrochemical Methods: Fundamentals and Applications,' 2nd ed., John Wiley & Sons, New York, 2000
  2. Madden, J. D. and Hunter, I. W., 'Three-Dimensional Microfabrication by Localized Electrochemical Deposition,' Journal of Microelectromechanical Systems, Vol. 5, No. 1, pp. 24-32, 1996 https://doi.org/10.1109/84.485212
  3. El-Giar, E. M., Said, R. A., Bridges, G. E. and Thomson, D. J., 'Localized Electrochemical Deposition of Copper Microstructures,' Journal of the Electrochemical Society, Vol. 147, No. 2, pp. 586-591, 2000 https://doi.org/10.1149/1.1393237
  4. Said, R. A., 'Microfabrication by Localized Electrochemical Deposition: Experimental Investigation and Theoretical Modeling,' Nanotechnology, Vol. 14, pp. 523-531, 2003 https://doi.org/10.1088/0957-4484/14/5/308
  5. Yeo, S. H., Choo, J. H. and Sim, K. H. A., 'On the Effects of Ultrasonic Vibrations on Localized Electrochemical Deposition,' Journal of Micromechanics and Microengineering, Vol. 12, pp. 271-279, 2002 https://doi.org/10.1088/0960-1317/12/3/312
  6. Yeo, S. H. and Choo, J. H., 'Effects of Rotor Electrode in the Fabrication of High Aspect Ratio Microstructures by Localized Electrochemical Deposition,' Journal of Micromechanics and Microengineering, Vol. 11, pp. 435-442, 2001 https://doi.org/10.1088/0960-1317/11/5/301
  7. Schuster, R., Kirchiner, V., Allongue, P. and Etrl, G., 'Electrochemical Micromachining,' Science, Vol. 289, pp. 98-101, 2000 101, 2000 https://doi.org/10.1126/science.289.5476.98
  8. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Localized Electro-chemical Micro Drilling Using Ultra Short Pulses,' Journal of the Korean Society of Precision Engineering, Vol. 20, No. 8, pp. 213-220, 2003
  9. Paik, W. K. and Park, S. M., 'Electrochemistry: Science and Technology of Electrode Processes,' Cheongmoongak, Seoul, 2001
  10. Jansson, A., Thornell, G. and Johansson, S., 'High Resolution 3D Microstructures Made by Localized Electrodeposition of Nickel,' Journal of the Electrochemical Society, Vol. 147, No. 5, pp. 1810-1817, 2000 https://doi.org/10.1149/1.1393439