Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of microscopic surface profile estimation algorithm through reflected laser beam analysis

레이저 반사광 분석을 통한 미세 표면 프로파일 추정 알고리즘의 개발

  • 서영호 (부산대원 지능기계공학과) ;
  • 안중환 (부산대학교 기계공학부) ;
  • 김화영 (부산대학교 기계기술연구소) ;
  • 김선호 (동의대학교 메카트로닉스공학과)
  • Published : 2005.11.01
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Abstract

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

Keywords

References

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