Fabrication of Micro Electrodes by Reverse EDM and Its Applications

역방전 가공을 이용한 미세 전극 제작과 그 응용

  • 최세환 (서울대학교 기계항공공학부) ;
  • 김보현 (서울대학교 기계항공공학부) ;
  • 박병진 (서울대학교 기계항공공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2005.11.01

Abstract

For increasing productivity of micro electrochemical machining (MECM), the application of multiple electrodes was introduced. The electrodes were fabricated by reverse electrical discharge machining (REDM). By REDM micro electrodes with various shapes can be machined easily. According to capacitance and applied voltage, machining characteristics of reverse EDM were investigated and the optimal conditions for stable machining were suggested. By using multiple electrodes and a channel-shape electrode, holes and channels were machined on stainless steel by ECM.

Keywords

References

  1. Takahata, K., Shibaike, N. and Guckel, H., 'High-aspect-ratio WC-Co Microstructure Produced by the Combination of LIGA and Micro-EDM,' Microsys. Tech., Vol. 6, No. 5, pp. 175-178, 2000 https://doi.org/10.1007/s005420000052
  2. Weng, F.T. and Her, M.G., 'Study of the Batch Production of Micro Parts Using the EDM Process,' Int. J. Adv. Manuf. Technol., Vol. 19, pp 266-270, 2002 https://doi.org/10.1007/s001700200033
  3. ??隆久, ヤをしぃマイクロ加工技術, 日刊工業新聞社, 2000
  4. Kim, B. H., 'Micro-Hole Machining Using MEDM with Screw-Type Electrode,' Thesis of Master Degree, Seoul National University, 1999
  5. Goto, A., Yuzawa, T., Magara, T. and Kobayashi, K., 'Study on Deterioration of Machining Performance by EDMed Sludge and Its Prevention,' Int. J. of Electrical Machining, No. 3, pp. 1-6, 1998
  6. Choi, S. H., Ryu, S. H., Choi, D., K. and Chu, C. N., 'Micro-electrochemical Machining and Deposition,' Proceedings of Korea-Japan Joint Symposium on Nanoengineering, pp. 64-71, 2003
  7. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Localized Electro-chemical Micro Drilling Using Ultra Short Pulses,' Korean Society of Precision Engineering, Vol. 20, No. 8, pp. 213-220, 2003
  8. Kim, B. H., Ryu, S. H., Choi, D. K., Chu, C. N., 'Micro Electrochemical Milling,' J. of Micromechanics and Microengineering, Vol. 15, pp. 124-129,2005 https://doi.org/10.1088/0960-1317/15/1/019