Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Rapid Manufacturing of 3D Micro Products by UV Laser Ablation and Phase Change Filling

UV 레이저 어블레이션과 상변화 충진을 이용한 3차원 마이크로 부품의 쾌속 제작

  • 신보성 (부산대학교 정밀정형 및 금형가공연구소) ;
  • 김재구 (한국기계연구원 지능형정밀기계연구부 나노공정그룹) ;
  • 장원석 (한국기계연구원 지능형정밀기계연구부 나노공정그룹) ;
  • 황경현 (한국기계연구원 지능형정밀기계연구부 나노공정그룹)
  • Published : 2005.11.01
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Abstract

UV laser micromachining are generally used to create microstructures for micro product through a sequence of lithography-based photopatterning steps. However, the micromachining process is not suitable for the rapid realization of complex 3D micro product because it depends on worker experiences, excessive cost and time to make many masks. In this paper, the more effective micro rapid manufacturing process, which is developed upon the base of laser micromachining, is proposed to fabricate micro products directly using UV laser ablation and phase change filling. The filling process is useful to hold the micro product during the next ablation step. The proposed micro rapid manufacturing process is also proven experimentally that enables to fabricate the 3D micro products of UV sensitive polymer from 3D CAD data to functional micro parts.

Keywords

References

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