Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Application of Tensile Tester for Thin Film Using ISDG

ISDG를 이용한 박막의 인장시험 장치 개발 및 물성 평가

  • 한승우 (한국기계연구원 나노공정장비연구센터) ;
  • 이상주 (한국기계연구원 나노공정장비연구센터) ;
  • 오충석 (금오공과대학교 기계공학과) ;
  • 안현균 (금오공과대학교 기계공학과) ;
  • 좌성훈 (삼성종합기술원 Display Lab) ;
  • 이학주 (한국기계연구원 나노공정장비연구센터)
  • Published : 2005.12.01
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References

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