Abstract
The photocatalyst $TiO_2$ thin film was made from titanium (IV) isopropoxide, ethanol, and HCl by sol-gel method. The surface observation by SEM showed the sample that was coated 5 times at $500^{\circ}C$ had good properties. The component ratio, in atom% of O : Ti by EDX analysis, of 61 : 39 by spin coating was superior than dip coating. It was found that crystal structure changed from anatase phase to rutile phase as a function of the temperature of thin film fabrication, and this was measured by XRD. The photolysis efficiency of total organic compounds (TOC) by lighting UV beam on $TiO_2$ thin film showed 20%~65% within 1 h, and decreased slowly thereafter.
광촉매 $TiO_2$박막은 titanium (IV) isopropoxide, 에탄올, HCl을 일정한 비율로 졸-겔방법에 의해 제작하였다. SEM에 의한 표면관찰에서는 $500^{\circ}C$에서 5회 반복해서 코팅하여 제작한 것이 우수했다. EDX에 의한 성분비는 spin코팅이 O : Ti의 atom%가 61 : 39로 dip코팅보다 우수했다. 그리고 박막제작의 온도에 따라서 anatase상에서 rutile상으로 결정구조가 변화되어 가는 것을 XRD측정으로 알았다. 제작한 $TiO_2$박막에 UV빔을 조사해서 얻은 TOC의 광분해효율이 1 h 이내에 20~65%를 나타내었고, 그 이후에는 서서히 감소하는 것을 확인했다.