Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

Influence of surface roughness and porosity on the hydrogen sorption speed of getter

표면 거칠기 및 다공도가 게터의 수소 흡착속도에 미치는 영향

  • In S. R. (Nuclear Fusion Research Lab. Korea Atomic Energy Research Institute)
  • 인상렬 (한국원자력연구소 핵융합연구실)
  • Published : 2005.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

The influence of the surface roughness and the porosity on the apparent sticking coefficient of the getter was determined quantitatively by Monte Carlo simulation. The sorption characteristics of the getter was investigated by solving numerically the particle balance equation depending on the sticking probability and diffusivity.

몬테카를로 계산을 통해 표면 거칠기와 세공 표면밀도가 게터의 겉보기 부착계수에 미치는 영향을 정량화했다. 또 부착계수와 게터 내부에서 확산속도에 따라 게터 흡착속도가 어떤 형태로 변화하는지 해석한 결과를 소개한다.

Keywords

References

  1. P. A. Redhead, J. P. Hobson, and E. V. kornelson, The physical basis of ultrahigh vacuum, AlP, ch 2 (1993)
  2. G. I. Grogorov, Vacuum 34, 513 (1984) https://doi.org/10.1016/0042-207X(84)90368-3
  3. C. Benvenuti and F. Francia, J. Vac. Sci. Technol. A 6, 2528 (1988) https://doi.org/10.1116/1.575541
  4. T. A. Giorgi, B. Ferrario, and B. Storey, J. Vac. Sci. Technol. A 3, 417 (1985) https://doi.org/10.1116/1.583027
  5. E. Giorgi, B. Ferrario, and C. Boffito, J. Vac. Sci. Technol. A 7, 218 (1989) https://doi.org/10.1116/1.576122
  6. B. Ferrario, A. Figini, and M. Borghi, Vacuum 35, 13 (1984) https://doi.org/10.1016/0042-207X(85)90070-3
  7. R. L. Knize and J. L. Cecchi, J. Appl. Phys. 54, 3183 (1983) https://doi.org/10.1063/1.332477
  8. J. L. Cecchi and R. L. Knize, J. Vac. Sci. Technol. A 2, 1214 (1984) https://doi.org/10.1116/1.572706
  9. 배석희 외, 진공공학, 한국경제신문사, 623 (2000)
  10. K. Icjimaru et al., J. Vac. Sci. Technol. A 6, 2541 (1988) https://doi.org/10.1116/1.575543