DOI QR코드

DOI QR Code

Fabrication of Patterned Media by Nano-molding

나노 성형의 관점에서 바라본 Patterned Media

  • Published : 2005.12.01

Abstract

Keywords

References

  1. T. Aoyama, S. Okawa, K. Hattori, H. Hatate, Y. Wada, K. Uchiyama, T. Kagotani, H. Nishio, I. Sato, 2001, Fabrication and magnetic properties of Copt perpendicular patterned media, Journal of Magnetism and Magnetic Materials, Vol. 235, pp. 174-178 https://doi.org/10.1016/S0304-8853(01)00332-8
  2. S. P. Li, M. Natali, A. Lebib, A. Pepin, Y. Chen, Y.B. Xu, 2002, Magnetic nanostructure fabrication by soft lithography and vortex-single domain transition in Co dots, Journal of Magnetism and Magnetic Materials, Vol. 241, pp. 447-452 https://doi.org/10.1016/S0304-8853(01)00441-3
  3. O. Dial, C. C. Cheng, A. Scherer, 1998, Fabrication of high-density nanostructures by electron beam lithography, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, pp. 3887-3890 https://doi.org/10.1116/1.590428
  4. C. T. Rettner, M. E. Best, B. D. Terris, 2001, Patterning of granular magnetic media with a focused ion beam to produce single-domain islands at >140 Gbit/in2, IE
  5. EE Transactions on Magnetics, Vol. 37, Issue 4, Part 1, pp. 1649-1651
  6. J. Lohau, A. Moser, C. T. Rettner, M. E. Best, B. D. Terris, 2001, Writing and reading perpendicular magnetic recording media patterned by a focused ion beam, Applied Physics Letters, Vol. 78, No. 7, pp. 990-992 https://doi.org/10.1063/1.1347390
  7. A. Fernandez, P. J. Bedrossian, S. L. Baker, S. P. Vernon, D. R. Kania, 1996, Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography, IEEE Transactions on Magnetics, Vol. 32, Issue 5, pp. 4472-4474 https://doi.org/10.1109/20.538901
  8. 김영규, 강신일, 2003, 나노 패턴 성형을 위한 금속 나노 스탬퍼 제작, 한국소성가공학회 춘계학술대회, p. 481
  9. 배재철, 김영민, 김홍민, 강신일, 2004, 단열층을 이용한 광디스크 기판의 서브 미크론 성형에 대한 수치해석, 한국소성가공학회지, 제 13권, 제 1호, pp. 39-44
  10. 김종성, 강신일, 2000, 광디스크 기판 성형시 발생하는 복굴절의 최소화를 위한 이론적 연구, 한국소성가공학회지, 제 9권, 제 2호, pp. 103-111
  11. N. Lee, Y. Kim, S. Kang, 2004, Temperature dependence of anti-adhesion between a stamper with sub-micron patterns and the polymer in nanomoulding processes, J. Phys. D: Appl. Phys. Vol. 37 No. 12, pp. 1624-1629 https://doi.org/10.1088/0022-3727/37/12/006
  12. N. Lee, Y. Kim, S. Kang, J. Hong, 2004, Fabrication of metallic nano-stamper and replication of nanopatterned substrate for patterned media, Nanotechnology, Vol. 19, issue 8, pp. 901-906
  13. N. Lee, J. Han, Y. Kim, S. Kim, Y. Choi, J. Lim, S. Kang, 2005, Replication of 40nm Class Nano-pillar Arrays Using Nano-injection Molding Process with Metallic Nano Stamper, HARMST 2005, pp. 1624-1629
  14. 김석민, 김동묵, 강신일, 전병희, 2002, 전사성향상을 위한 마이크로 UV 성형 공정 최적화, 한국소성가공학회 추계학술대회, pp. 343-346
  15. S. Kang, J. Kim, S. Kang, 2000, Birefringence distribution in magneto-optical disk substrate fabricate by injection compression molding, 39 : pp.689-694
  16. Y. Kim, Y. Choi, S. Kang 2005, Replication of high density optical disc using injection mold with MEMS heater, Microsystem Technologies, Vol. 11, pp. 464-469 https://doi.org/10.1007/s00542-005-0596-3
  17. Youngmin Kim, Yong Choi, Young-Joo Kim, Shinill Kang, 2005, Construction of Injection Mold with MEMS RTD Sensor and MEMS Heater for Micromano Molding Process, Japanese Journal of Applied Physics, Vol. 44, No. 5B, pp. 3591-3595 https://doi.org/10.1143/JJAP.44.3591