DOI QR코드

DOI QR Code

Cosputtering법으로 증착한 ZnO박막의 Al도핑농도가 미세구조 및 물리적 특성에 끼치는 효과

Effects of Al Doping Concentration on the Microstructure and Physical Properties of ZnO Thin Films Deposited by Cosputtering

  • 임근빈 (인하대학교 신소재공학부) ;
  • 이종무 (인하대학교 신소재공학부)
  • Yim, Keun-Bin (Department of Materials Science and Engineering, Inha University) ;
  • Lee, Chong-Mu (Department of Materials Science and Engineering, Inha University)
  • 발행 : 2005.09.01

초록

Dependence of the crystallinity, surface roughness, carrier concentration, carrier mobility, electrical resistivity and transmittance of Al-doped ZnO films deposited on glass substrates by RF-magnetron sputtering on effects of the ratio of the RF power for AlZnO to that for ZnO (R) have been investigated. X-ray diffraction spectra show strong preferred orientation along the c-axis. The full width at half maximum (FWHM) of the ZnO (002) peak decreases slightly as R increases in the range of R<1.0, whereas it increases substantially in the range of R>1.0. Scanning electron micrographs (SEM) show that the ZnO film surface becomes coarse as R increases. The carrier concentration and the carrier mobility in the ZnO thin film are maximal for R=1.5 and 1.0, respectively. The electrical resistivity is minimal for R=1.0 The transmittance of the ZnO:Al film tends to increase, but to decrease slightly in the range of R>0.5. It may be concluded that the optimum R value is 1.0, considering all these analysis results. The cause of the changes in the structure and physical properties of ZnO thin films with R are also discussed.

키워드

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