Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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Fabrication of Microcantilever Ultrasound Sensor and Its Application to the Scanning Laser Source Technique

  • Sohn, Young-Hoon (Center for Quality Engineering and Failure Prevention, Narthwestern University) ;
  • Krishnaswamy, Sridhar (Center for Quality Engineering and Failure Prevention, Narthwestern University)
  • Published : 2005.12.30
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Abstract

The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects, By monitoring the amplitude and frequency changes of the ultrasound generated as the SLS scans over a defect, the SLS technique has provided enhanced signal-to-noise performance compared to the traditional pitch-catch or pulse-echo ultrasonic methods, An extension of the SLS approach to map defects in microdevices is proposed by bringing both the generator and the receiver to the near-field scattering region of the defects, To facilitate near-field ultrasound measurement, silicon microcantilever probes are fabricated using microfabrication technique and their acoustical characteristics are investigated, Then, both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.

Keywords

References

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