Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Taper Reduction in Micro Electrochemical Milling Using Disk-type Electrode

디스크 전극을 이용한 미세 전해 밀링 가공에서의 테이퍼 형상 방지

  • 김보현 (서울대학교 기계항공공학부) ;
  • 이영수 (서울대학교 기계항공공학부) ;
  • 최덕기 (강릉대학교 정밀기계공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2005.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

Keywords

References

  1. Schaller, Th., Bohn, L., Mayer, J. and Schubert, K., 'Microstructure Grooves with a Width of Less than 50 ${\mu}m$ Cut with Ground Hard Metal Micro End Mills,' Precision Engineering, Vol. 23, No. 4, pp. 229-235, 1999 https://doi.org/10.1016/S0141-6359(99)00011-2
  2. Yu, Z. Y., Masuzawa, T. and Fujino, M., 'Micro-EDM for Three-Dimensional Cavities - Development of Uniform Wear Method -,' Annals of the CIRP, Vol. 47, No. 1, pp. 169-172, 1997 https://doi.org/10.1016/S0007-8506(07)62810-8
  3. Schuster, R., Kirchiner, V., Allongue, P. and Etrl, G., 'Electrochemical Micromachining,' Science, Vol. 289, pp.98-101, 2000 https://doi.org/10.1126/science.289.5476.98
  4. Bard, A. J. and Faulkner, L. R., Electrochemical Methods: Fundamentals and Applications, 2nd ed., John Wiley & Sons, New York, 2000
  5. Paik, W. K. and Park, S. M., Electrochemistry: Science and Technology of Electrode Processes, Cheongmoongak, Seoul, 2001
  6. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Localized Electro-chemical Micro Drilling Using Ultra Short Pulses,' J. of the KSPE, Vol. 20, No. 8, pp. 213-220, 2003
  7. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Electro-Chemical Micro Drilling Using Ultra Short Pulses,' Precision Engineering, Vol. 28, No. 2, pp. 129-134, 2004 https://doi.org/10.1016/j.precisioneng.2003.07.004
  8. McGeough, J. A., Principles of Electrochemical Machining, Chapman and Hall, London, 1974
  9. Masuzawa, T., Fujino, M. and Kobayashi, K., 'Wire Electro-Discharge Grinding Method,' Annals of the CIRP, Vol. 34, No. 1, pp. 431-434, 1985 https://doi.org/10.1016/S0007-8506(07)61805-8