A Robust Algorithm for Roughness Laser Measurement based on Light Power Regulation against Specimen Changes

  • Seo Young Ho (Graduate school, Department of Mechanical and Intelligent Systems Engineering, Pusan National University) ;
  • Ahn Jung Hwan (ERC / NSDM, Professor, School of Mechanical Engineering, Pusan National University)
  • 발행 : 2005.05.01

초록

Methods for measuring surface roughness based on light reflectivity have advantages over methods based on light interference or diffraction, especially in in-situ, on-the-machine and in-process applications. However, measurement inconsistencies caused by changes in the specimen are still a drawback for field applications. In this study, we propose a new feedback-based algorithm to enhance the consistency against changes in the specimen. The algorithm is deduced from simulations based on light reflectance theory with typical modeled surfaces. The proposed method is similar to a digital controller and regulates the power of reflected light. Experiments varying heights and materials, verified the improvements in robustness of the method against measurement disturbances caused by specimen changes.

키워드

참고문헌

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