Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Deposition of Permalloy Nanostructured Thin Film Utilizing Supersonic Deposition of Nanoparticles Formed by Laser Ablation of Microparticles

마이크로입자의 레이저 Ablation으로 형성된 나노입자의 수펴소닉 적층법을 이용한 퍼멀로이 나노구조박막 적층에 관한 연구

  • 윤의중 (호서대학교 정보제어공학과) ;
  • 정명희 (안양대학교 디지털미디어공학과)
  • Published : 2005.05.01
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Abstract

In this paper, we synthesized 10 to 20 nm diameter NiFe nanoparticles and nanoparticle films utilizing supersonic jet deposition of nanoparticle aerosols generated by laser ablation of $30\;to\;45{\mu}m$ diameter permalloy $(Ni_{81}Fe_{19} \;at\;{\%})$ microparticles. The component and composition of the nanoparticles were characterized by an energy dispersive X-ray spectroscopy. The morphology of the nanoparticles and nanoparticle films was analyzed by a high-resolution transmission electron microscopy and a scanning electron microscopy, respectively. The experimental results showed that the nanoparticles and nanoparticle films have remarkable properties with an excellent preservation of the composition of feedstock permalloy microparticles. The purpose of the present work is to present details on the composition and nanostructural characterizations for NiFe nanoparticles and nanoparticle films prepared by laser ablation of microparticles (LAM).

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References

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