Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Low-Temperature Sintering and Dielectric Properties of BaTiO3-Based Ceramics for Embedded Capacitor of LTCC Module

LTCC 내장 캐패시터용 BaTiO3계 세라믹스의 저온소결 및 유전특성

  • Park, Jeong-Hyun (Multifunctional Ceramics Research Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University) ;
  • Choi, Young-Jin (Multifunctional Ceramics Research Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University) ;
  • Ko, Won-Jun (Multifunctional Ceramics Research Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University) ;
  • Park, Jae-Hwan (Multifunctional Ceramics Research Center, Korea Institute of Science and Technology) ;
  • Nahm, Sahn (Department of Materials Science and Engineering, Korea University) ;
  • Park, Jae-Gwan (Multifunctional Ceramics Research Center, Korea Institute of Science and Technology)
  • 박정현 (한국과학기술연구원 복합기능세라믹스연구센터, 고려대학교 재료공학과) ;
  • 최영진 (한국과학기술연구원 복합기능세라믹스연구센터, 고려대학교 재료공학과) ;
  • 고원준 (한국과학기술연구원 복합기능세라믹스연구센터, 고려대학교 재료공학과) ;
  • 박재환 (한국과학기술연구원 복합기능세라믹스연구센터) ;
  • 남산 (고려대학교 재료공학과) ;
  • 박재관 (한국과학기술연구원 복합기능세라믹스연구센터)
  • Published : 2005.02.01
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Abstract

The compositions for LTCC embedded capacitors based on $BaTiO_3$ ceramics with $5\~15\;wt\%$ of lithium-borosilicate glass frits were studied. After the glass frits, which is chemically stable and has acceptable ability of low-temperature sintering, were added to the host dielectric materials, the sintering behavior and dielectric properties were evaluated. As for $BaTiO_3$, relative density of >$95\%$, permittivity 990, and dielectric loss $3.1\%$ were obtained when sintered at $925^{\circ}C$ with 5 wt$\%$ of glass frits. As for $(Ba,Ca)(Ti,Zr)O_3$ ceramics, relative density of >$95\%$, open porosity <$0.5\%$, permittivity 700, and dielectric loss $2\%$ were obtained when sintered at $875^{\circ}C$ with 10 wt$\%$ of glass frits.

[ $BaTiO_3$ ]계 유전체 모재료에 대하여 $Al_{2}O_{3}$와 CaO 조성이 소량 포함된 lithium-borosilicate계 유리 프릿을 $5\~15wt\%$ 적용함으로써 LTCC용 내장 캐패시터로 적용 가능한 조성을 개발하였다. 이를 위하여 먼저, 화학적으로 안정하고 저온소성효과가 탁월한 유리 프릿 조성물을 설계하고 이를 유전체 모재료에 적용하여 저온소성특성 및 유전특성을 평가하였다. $BaTiO_3$ 세라믹스를 모재료로 하는 경우 유리 프릿을 5wt$\%$ 첨가하였을 때 $925^{\circ}C$에서 $95\%$ 정도의 상대밀도 값을 나타내었으며, 이 경우 유전율 990, 유전손실 $3.1\%$의 유전특성을 나타내었다. $(Ba,Ca)(Ti,Zr)O_3$ 세라믹스를 모재료로 하여 유리프릿을 10 wt$\%$ 첨가한 경우는 $875^{\circ}C$의 소결온도에서 상대밀도가 $95\%$ 이상이며 기공율 $0.5\%$ 이하인 소결특성을 나타내었고, 700 이상의 유전율 및 $2\%$ 내외의 유전손실 값을 가지는 것으로 측정되었다.

Keywords

References

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