센서학회지 (Journal of Sensor Science and Technology)

  • 제15권5호
  • /
  • Pages.357-361
  • /
  • 2006
  • /
  • 1225-5475(pISSN)
  • /
  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
권호 표지
DOI QR코드

DOI QR Code

바이오 멤스 및 마이크로 시스템 적용을 위한 3차원 마이크로 유로 제작

Fabrication of 3-D microchannel for biomems and micro systems application

  • Yun, Kwang-Seok (Mechanical and Aerospace Engineering Department, University of California)
  • 발행 : 2006.09.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step exposure to control the thicknesses of photoresist structures. Various shapes of photoresist structures were successfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS. In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMS alignment.

키워드

참고문헌

  1. B.-H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, 'Three-dimensional micro-channel fabrication in polydimethylsiloxane(PDMS) elastomer', J. Microelectrornech. Syst., vol. 9, no. 1, pp. 76-81, 2000 https://doi.org/10.1109/84.825780
  2. 윤광석, 이도훈, 김학성, 윤의식, '미소유체 칩 상에서 Quantum Dot 및 마이크로 비드를 이용한 생체물질 분석', 센서학회지, 제14권, 제5호, pp. 308-312, 2005 https://doi.org/10.5369/JSST.2005.14.5.308
  3. 정귀상, 우형순, 'PDMS 몰드를 이용한 초고온 MEMS용 미세구조물 제작과 그 특성', 센서학회지, 제15권, 제1호, pp. 53-57, 2006 https://doi.org/10.5369/JSST.2006.15.1.053
  4. F. G. Tseng, Y. J. Chuang, and W. K. Lin, 'A novel fabrication method of embedded micro channels employing simple UV dosage control and antire-flection coating', IEEE 15th International Conference on MEMS, pp. 69-72, 2002
  5. F. E. H. Tay, J. A. V. Kan, F. Watt, and W. O. Choong, 'A novel micro-machining method for the fabrication of thick-film SU-8 embedded microchannels', J. Micrornech. Microeng., vol. 11, pp. 27-33, 2001 https://doi.org/10.1088/0960-1317/11/1/305
  6. Y.-K. Yoon, J.-H. Park, F. Cros, and M. G. Allen, 'Integrated vertical screen microfilter system using inclined SU-8 structures', IEEE 16th International Conference on MEMS, pp. 227-230, 2003
  7. M. Han, W. Lee, S.-K. Lee, and S. S. Lee, 'Fabrication of 30 microstructures with inclined/rotated UV lithography', IEEE 16th International Conference on MEMS, pp. 554-557, 2003
  8. J. R. Anderson, O. T. Chiu, R. J. lackman, O. Cherniavskaya, J. C. McDonald, H. Wu, S. H. Whitesides, and G. M. Whitesides, 'Fabrication of topologically complex three-dimensional microfluidic systems in POMS by rapid prototyping', Anal. Chem., vol. 72, pp. 3158-3164, 2000 https://doi.org/10.1021/ac9912294
  9. K.-S. Yun and E. Yoon, 'A micro/nano-fluidic chipbased micro-well array for high-throughput cell analysis and drug screening', Proceedings of $\mu$TAS 2003, pp. 861-864, 2003
  10. O. Hofmann, P. Niederrnann, and A. Manz, 'Modular approach to fabrication of three-dimensional microchannel systems in POMS-application to sheath flow microchips', Lab Chip, vol. 1, no. 2, pp. 108-114, 2001 https://doi.org/10.1039/b105110p
  11. K.-S. Yun and E. Yoon, 'Microfabrication of 3dimensional photoresist structures using selective patterning and development on two types of specific resists and its application to microfluidic components', IEEE International conference on MEMS, pp. 757-760, 2004
  12. J.-B. Yoon, J.-D. Lee, C.-H. Han, E. Yoon, and C.K. Kim, 'Multilevel microstructure fabrication using single-step 30 photolithography and singlestep electroplating', Proc. SPIE, vol. 3512, pp. 358-366, 1998