Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Electrical and Optical Characteristics of ZnO:Al Films Prepared by rf Magnetron Sputtering for Thin Film Solar Cells Application

rf 마그네트론 스파터법에 의해 제조된 태양전지용 ZnO:Al 박막의 전기 광학적 특성

  • Jeon, Sang-Won (Solar Cells Research Center, Korea Institute of Energy Research (KIER)) ;
  • Lee, Jeong-Chul (Solar Cells Research Center, Korea Institute of Energy Research (KIER)) ;
  • Park, Byung-Ok (Dep. of Inorganic Materials Engineering, Kyungpook National University) ;
  • Song, Jin-Soo (Solar Cells Research Center, Korea Institute of Energy Research (KIER)) ;
  • Yoon, Kyung-Hoon (Solar Cells Research Center, Korea Institute of Energy Research (KIER))
  • 전상원 (한국에너지기술연구원 태양전지연구센터) ;
  • 이정철 (한국에너지기술연구원 태양전지연구센터) ;
  • 박병옥 (경북대학교 무기재료공학과) ;
  • 송진수 (한국에너지기술연구원 태양전지연구센터) ;
  • 윤경훈 (한국에너지기술연구원 태양전지연구센터)
  • Published : 2006.01.27
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Abstract

ZnO:Al(AZO) films prepared by rf magnetron sputtering on glass substrate and textured by post-deposition chemical etching were applied as front contact and back reflectors for ${\mu}c$-Si:H thin film solar cells. For the front transparent electrode contact, AZO films were prepared at various working pressures and substrate temperature and then were chemically etched in diluted HCl(1%). The front AZO films deposited at low working pressure(1 mTorr) and low temperature ($240^{\circ}C$) exhibited uniform and high transmittance ($\geq$80%) and excellent electrical properties. The solar cells were optimized in terms of optical and electrical properties to demonstrate a high short-circuit current.

Keywords

References

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