Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Effect of Ultrathin Film HfO2 by Atomic Layer Deposition on the Propreties of ZnS:Cu,Cl Phosphors

ZnS:Cu,Cl 형광체의 특성에 미치는 원자층 증착 초박막 HfO2의 영향

  • Kim, Min-Wan (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Han, Sand-Do (Sensors and Advanced Materials Lab., Korea Institute of Energy Research) ;
  • Kim, Hyung-Su (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Kim, Hyug-Jong (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Kim, Hyu-Suk (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Kim, Suk-Whan (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Lee, Sang-Woo (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology) ;
  • Choi, Byung-Ho (School of Advanced Materials and Systems Engineering, Kumoh National Institute of Technology)
  • 김민완 (금오공과대학교 신소재시스템공학부) ;
  • 한상도 (한국에너지기술연구원) ;
  • 김형수 (금오공과대학교 신소재시스템공학부) ;
  • 김혁종 (금오공과대학교 신소재시스템공학부) ;
  • 김휴석 (금오공과대학교 신소재시스템공학부) ;
  • 김석환 (금오공과대학교 신소재시스템공학부) ;
  • 이상우 (금오공과대학교 신소재시스템공학부) ;
  • 최병호 (금오공과대학교 신소재시스템공학부)
  • Published : 2006.04.27
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Abstract

An investigation is reported on the coating of ZnS:Cu,Cl phosphors by $HfO_2$ using atomic layer deposition method. Hafnium oxide films were prepared at the chamber temperature of $280^{\circ}C$ using $Hf[N(CH_3)_2]_4\;and\;O_2$ as precursors and reactant gas, respectively. XPS and ICP-MS analysis showed the surface composition of coated phosphor powder was hafnium oxide. In FE-SEM analysis, the surface morphology of uncoated phosphors became smoother and clearer as the number of ALD cycle increased from 900 to 1800. The photoluminescence intensity for coated phosphors showed $7.3{\sim}13.4%$ higher than that of uncoated. The effect means that the reactive surface is uniformly coated with stable hafnium oxide to reduce the dead surface layer without change of bulk properties and also its absorptance is almost negligible due to ultrathin(nano-scaled) films. The growth rate is about $1.1{\AA}/cycle$.

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