Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Fabrication of Transparent and Conductive Al-doped ZnO Films for Solar Cells

태양전지용 ZnO:Al 투명전도막의 제작

  • Tark, Sung-Ju (Department of Materials Science and Engineering, Korea University) ;
  • Kang, Min-Gu (Department of Materials Science and Engineering, Korea University) ;
  • Kim, Dong-Hwan (Department of Materials Science and Engineering, Korea University)
  • Published : 2006.07.27
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Abstract

Al-doped zinc oxide (ZnO:Al) films for transparent electrodes in thin film solar cells were deposited on glass substrates at a low temperature of $200^{\circ}C$ by rf magnetron sputtering. The transmittance of the ZnO:Al films in the visible range was 87%. The lowest resistivity of the ZnO:Al films was about $5.8{\times}10^{-4}{\Omega}$ cm at the Al content of 2.5 wt%. After deposition, the surface of ZnO:Al films were etched in dilute HCl (0.5%) for the investigation of the change in the electrical properties and the surface morphology due to etching.

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