Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Porous SnO2 Films Fabricated Using an Anodizing Process

양극산화법에 의한 다공성 SnO2 피막

  • Han, Hye-Jeong (Dept. of Metal and Materials Eng., Kangnung National University) ;
  • Choi, Jae-Ho (Dept. of Metal and Materials Eng., Kangnung National University) ;
  • Min, Seok-Hong (Dept. of Metal and Materials Eng., Kangnung National University)
  • 한혜정 (강릉대학교 금속재료공학과) ;
  • 최재호 (강릉대학교 금속재료공학과) ;
  • 민석홍 (강릉대학교 금속재료공학과)
  • Published : 2006.08.27
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Abstract

The measurement of specific gases is based on the reversible conductivity change of sensing materials in semiconductor type gas sensors. For an application as gas sensors of high sensitivity, porous $SnO_2$ films have been fabricated by anodizing of pure Sn foil in oxalic acid and characteristics of anodic tin oxide films have been investigated. Pore diameter and distribution were dependent on process conditions such as electrolyte concentration, applied voltage, anodizing temperature, and time. Characteristics of anodic films were explained with current density-time curves.

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References

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