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Synthesis of AlN Powders from AlOOH

AlOOH로부터 AlN분말의 합성

  • Lee, Jae-Bum (Department of Materials Science and Engineering, Hanbat National University) ;
  • Kim, Seon-Tai (Department of Materials Science and Engineering, Hanbat National University)
  • 이재범 (한밭대학교 신소재공학부) ;
  • 김선태 (한밭대학교 신소재공학부)
  • Published : 2006.12.27

Abstract

In this study, we report a method to synthesize the aluminum nitride (AlN) powders from aluminum oxyhydroxide (AlOOH). AlOOH powders were prepared from the aluminum hydroxide ($Al(OH)_3$) by heattreatment at the reaction temperature of $350^{\circ}C$. Simple heat treatment of AlOOH in the flow of $NH_3$ gas leads to the formation of hexagonal AlN powders through intermediate conversion of ${\delta}-,\;{\gamma}-$ and ${\alpha}-Al_2O_3$. The FTIR transmission spectra show a broad peak related to Al-N bonds centered around 690 $cm^{-1}$ confirming the presence of AlN. The major peaks in Raman spectra were observed in 250 $cm^{-1}$ and 659 $cm^{-1}$. From the results, synthesized powders from the AlOOH powders were confirmed AlN powders.

Keywords

References

  1. A. F. Belyanin, L. L. Bouilov, V. V. Zhirnov, A. I. Kamenev, K. A. Kovalskij and B. V. Spitsyn, Dia. and Rel Mater., 8, 369 (1999) https://doi.org/10.1016/S0925-9635(98)00412-9
  2. K. Kaya, H. Takahashi, Y. Shibata, Y. Kanno and T. Hirai, Jpn. J. Appl. Phys., 36, 2837 (1997) https://doi.org/10.1143/JJAP.36.2837
  3. J. A. Ruffner, P. G. Clem, B. A. Tuttle, D. Dimos and D. M. Gonzles, Thin Solid Fllms, 354, 256 (2000) https://doi.org/10.1016/S0040-6090(99)00521-0
  4. Z. R. Song, Y. H. Yu. S. C. Zou. Z. H. Zheng, D. S, Shen, E. Z. Luo, Z, Xie, and B. Sundaravel, Thin Solid Films, 459. 41 (2004) https://doi.org/10.1016/j.tsf.2003.12.091
  5. L. M. Sheppard, Ceram. Bull, 69, 1801 (1990)
  6. Y. Baik anld R. A. L. Drew, Key Eng. Mater., 122, 553 (1996) https://doi.org/10.4028/www.scientific.net/KEM.122-124.553
  7. Y. Kameshima, M. Irie, A. Yasumori and K. Okada, Sol. Stat, Ionics, 172, 185 (2004) https://doi.org/10.1016/j.ssi.2004.05.015
  8. J. C. Kuang, C. R. Zhang, X. G. Zhou, and S. Q. Wang, J. Cryst. Growth, 263, 12 (2004) https://doi.org/10.1016/j.jcrysgro.2003.10.089
  9. T. Sakai and M. Jwata. Jpn, J. Ceram. Soc., 82, 181 (1974)
  10. S. Hirai, T. Miwa, T. twata, M. Ozawa and H. G. Katayama, J. Jpn Inst. Metals, 53, 1035 (1989) https://doi.org/10.2320/jinstmet1952.53.10_1035
  11. V. Rosenband and A. Gany, J. Mater. Process. Technol., 147, 197 (2004) https://doi.org/10.1016/j.jmatprotec.2003.12.017
  12. C. N. Lin and S, L. Chung, J. Mater, Res., 16, 2200 (2001) https://doi.org/10.1557/JMR.2001.0302
  13. H. P. Klug and L. E. Alexander, X-ray Diffraction Procedures, New York, p.531 (1974)
  14. A. Chang, S, W. Rhee and S. Baik, J. Am. Ceram. Soc., 78, 33 (1995) https://doi.org/10.1111/j.1151-2916.1995.tb08357.x
  15. Z. Y. Fan and N. Newman, Mater. Sci and Eng., B 87, 244 (2001) https://doi.org/10.1016/S0921-5107(01)00720-6
  16. O. Ambacher, M. S, Brandt, R. Dimitrov, T. Metzger, M. Stutzmann, R. A. Fischer, A. Miehr, A. Bergmaier and G. Dollinger, J. Vac. Sci. Technol., B 14, 3532 (1996) https://doi.org/10.1116/1.588793
  17. A. T. Collins, E .C. Lightowlers and P. J. Dean, Phys. Rev., 158, 833 (1967) https://doi.org/10.1103/PhysRev.158.833
  18. W. Zhang, Y. Someno, M. Sasaki and T. Hirai, Jpn. J. Appl, Phys., 32, L116 (1993) https://doi.org/10.1143/JJAP.32.L116
  19. F. Hasegawa, T. Takahashi, K. Kubo and Y. Nannichi, Jpn. J. Appl. Phys., 26, 1555 (1987) https://doi.org/10.1143/JJAP.26.1555
  20. S. M. Oh and D. W. Park, Thin Solid Films. 316, 189 (1998) https://doi.org/10.1016/S0040-6090(98)00413-1
  21. G Beamson and D. Briggs, Infrared Spectra of Inorganic Compouods, vol. 4, p.110, Academic Press Inc., London, 1997
  22. J. M. Hays, M. Kuball, Y. Shi, and J. H. Edgar, Jpn. J. Appl. Phys., 39, L710 (2000) https://doi.org/10.1143/JJAP.39.L710
  23. V. Y. Davydov, Y. E. Kitaev, I. N. Goncharuk, A. N. Smirnov, J. Graul, O. Semchinova, D. Uffmann, M. B. Smirnov, A. P. Mirogorodsky and R. A. Evarestov, Phys, Rev, B 58, 12899 (1998) https://doi.org/10.1103/PhysRevB.58.12899
  24. L. Filippids. H. Siegle, A. Hoffmann, C. Thomsen, K. Karch and F. Bechstedt. Phys. Stat, Sol., B 198, 621 (1996) https://doi.org/10.1002/pssb.2221980207
  25. U. Haboeck H. Siegle A. Hoffmann and C. Thomsen, Phys. Stat. Sol., C 6, 1710 (2003)
  26. C. Carlone, K, M. Lakin, and. H. R. Shanks, J. Appl, Phys., 55, 4010 (1984) https://doi.org/10.1063/1.332989