Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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The Prediction of Etching Characteristics Using Monte-Carlo Simulation in Etching Process of Lead-Frame

Lead-Frame 에칭공정에서 몬테카를로 시뮬레이션을 이용한 에칭특성 예측

  • 정흥철 (부산대학교 기계공학과) ;
  • 최경민 (부산대학교 기계공학부) ;
  • 김덕줄 (부산대학교 기계공학부 기계기술연구소)
  • Published : 2006.01.01
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Abstract

The objective of this work is to simulate the etching characteristics for the optimization on the etching process of Lead-Frame. The etching characteristics such as etching factor, etching uniformity were investigated under different the actual operating conditions. The correlation between the etching characteristics and the spray ones were analyzed to simulate the etching characteristics in the etching process. To improve the etching characteristics in the etching process, effects of the various operating conditions such as pressure, distance from nozzle tip, pipe pitch, and feed speed should be understood in detail. The spray characteristics obtained by experiment using PDA system were simulated by the Monte-Carlo simulation. The etching process model was coded by Java language. It was found that the spray characteristics were correlated with the etching ones and simulation results generally agreed well with the measured results of etching characteristics in the etching process of Lead-Frame. The optimal operating parameters were successfully found under variable conditions.

Keywords

References

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