Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Dissolution Phenomenon in BaO-B2O3-ZnO Glass System by Acid Etching

산 에칭에 의한 BaO-B2O3-ZnO계 유리조성물의 용출 현상

  • 김재명 (인하대학교 신소재공학부) ;
  • 홍경준 ((주)휘닉스 PDE 기술연구소) ;
  • 김남석 (인하대학교 신소재공학부) ;
  • 김형순 (인하대학교 신소재공학부)
  • Published : 2006.01.01
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Abstract

For producing the fine ribs structure of plasma display panel, the metal ions of barrier materials during the etching process should be understood on the etching mechanism with etching conditions. Etching was done on bulk glasses of the $BaO_B_2O_3-ZnO$ system with $HNO_3$ solution at $40^{\circ}C$. The surface structure of glasses and ion dissolution were analyzed by ICP (Inductive Coupled Plasma measurement). The structure and surface of the etched bulk glass were investigated by using scanning electron microscopy and nanoindenter. As a result, Ba (3-35 ppm/min) and Zn (2-27 ppm/min) ions as major components were leached in the solution and the leached layers were found to be phosphor-rich surface layers. A decrease of the bridge oxygen and relative increase of non bridge oxygen in the etched glass were found by X-ray photoelectron spectroscopy.

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References

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