Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Structure Analysis of BaTiO3 Film on the MgO(100) Surface by Impact-Collision Ion Scattering Spectroscopy

직충돌 이온산란 분광법을 사용한 MgO(100) 면에 성장된 BaTiO3막의 구조해석

  • Hwang, Yeon (Department of Materials Science and Engineering, Seoul National University of Technology) ;
  • Lee, Tae-Kun (Department of Materials Science and Engineering, Seoul National University of Technology)
  • 황연 (서울산업대학교 신소재공학과) ;
  • 이태근 (서울산업대학교 신소재공학과)
  • Published : 2006.01.01
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Abstract

Time-of-flight impact-collision ion scattering spectroscopy (TOF-ICISS) using 2 keV $He^+$ ion was applied to study the geometrical structure of the $BaTiO_3$ thin film which was grown on the MgO(100) surface. Hetero-epitaxial $BaTiO_3$ layers were formed on the MgO(100) surface by thermal evaporation of titanium followed first by oxidation at $400^{\circ}C$, subsequently by barium evaporation, and finally by annealing at $800^{\circ}C$. The atomic structure of $BaTiO_3$ layers was investigated by the scattering intensity variation of $He^+$ ions on TOF-ICISS and by the patterns of reflection high energy electron diffraction. The scattered ion intensity was measured along the <001> and <011> azimuth varying the incident angle. Our investigation revealed that perovskite structured $BaTiO_3$ layers were grown with a larger lattice parameter than that of the bulk phase on the MgO(100) surface.

Keywords

References

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