대한전자공학회논문지TC (Journal of the Institute of Electronics Engineers of Korea TC)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

$41^{\circ}YX\;LiNbO_3$ 기반 SAW 압력센서 개발

Novel SAW-based pressure sensor on $41^{\circ}YX\;LiNbO_3$

  • 왕웬 (아주대학교 전자공학부) ;
  • 이기근 (아주대학교 전자공학부) ;
  • 황정수 (아주대학교 전자공학부) ;
  • 김근영 (아주대학교 전자공학부) ;
  • 양상식 (아주대학교 전자공학부)
  • 발행 : 2006.01.01
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초록

Single phase unidirectional transducer (SPUDT), 리플렉터, 웨이퍼 본딩 패키지로 구성된 표면탄성파 (surface acoustic wave, SAW) 기반 압력센서가 개발되어 졌다. Coupling of Mode (COM) 모델링에 의한 소자의 시뮬레이션 및 최적 설계 변수가 얻어졌다. Finite Element Methods (FEM)를 통해 주어진 압력에 따른 다이어프램 벤딩, 스트레인/스트레스 변화 및 SAW 속도변위가 미리 예측되어졌다. 유출된 최적 설계 변수를 이용 440 MHz SAW 기반 압력센서가 41o YX LiNbO3 기판 위에서 제작되어졌다. 고 S/N 비, 임펄스 리프렉션 피크, 작은 에러 피크가 관찰되어졌다. 측정된 S11 결과는 COM 모델링 및 FEM 시뮬레이션 결과와 일치함을 보였다.

This paper presents a novel surface acoustic wave (SAW)-based pressure sensor, which is composed of single phase unidirectional transducer (SPUDT), three reflectors, and a deep etched substrate for bonding underneath the diaphragm. Using the coupling of modes (COM) theory, the SAW device was simulated, and the optimized design parameters were extracted. Finite Element Methods (FEM) was utilized to calculate the bending and stress/strain distribution on the diaphragm under a given pressure. Using extracted optimal design parameters, a 440 MHz reflective delay line on 41o YX LiNbO3 was developed. High S/N ratio, shan reflection peaks, and small spurious peaks were observed. The measured S11 results showed a good agreement with simulated results obtained from coupling-of-modes (COM) modeling and Finite Element Method (FEM) analysis.

키워드

참고문헌

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