정전기 분무 증착법에 대한 최근 연구 동향 고찰

Research Issues of Electrostatic Spray Deposition (ESD) Technique

  • 류성욱 (한국과학기술원 기계공학과) ;
  • 이상용 (한국과학기술원 기계공학과)
  • 발행 : 2006.03.31

초록

Performance of thin films fabricated with the electrostatic spray deposition (ESD) technique is strongly governed by surface morphology, which depends on deposition parameters such as deposition time and temperature, solution properties, and surface characteristics of substrates. In this article, the state of the art on the relationships between the surface morphology and the deposition parameters is presented. Also studies on the electro-hydrodynamic atomization process and the motion of drops relevant to the ESD technique are briefly reviewed, and the future research works are suggested.

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