Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication of Solid Oxide Fuel Cells with Electron Beam Physical Vapor Deposition: I. Preparation of Thin Electrolyte Film of YSZ

전자빔 물리증착을 이용한 고체 산화물 연료전지의 제조 : I. YSZ 박막 전해질의 제조

  • Kim, Hyoungchul (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Koo, Myeong-Seo (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Park, Jong-Ku (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Jung, Hwa-Young (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Kim, Joosun (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Lee, Hae-Weon (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
  • Lee, Jong-Ho (Nano-Materials Research Center, Korea Institute of Science and Technology)
  • 김형철 (한국과학기술연구원 나노재료연구센터) ;
  • 구명서 (한국과학기술연구원 나노재료연구센터) ;
  • 박종구 (한국과학기술연구원 나노재료연구센터) ;
  • 정화영 (한국과학기술연구원 나노재료연구센터) ;
  • 김주선 (한국과학기술연구원 나노재료연구센터) ;
  • 이해원 (한국과학기술연구원 나노재료연구센터) ;
  • 이종호 (한국과학기술연구원 나노재료연구센터)
  • Published : 2006.02.01
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Abstract

Electron Beam Physical Vapor Deposition (EB-PVD) was applied to fabricate a thin film YSZ electrolyte with large area on the porous NiO-YSZ anode substrate. Microstructural and thermal stability of the as-deposited electrolyte film was investigated via SEM and XRD analysis. In order to obtain an optimized YSZ film with high stability, both temperature and surface roughness of substrate were varied. A structurally homogeneous YSZ film with large area of $12\times12\;cm^2$ and high thermal stability up to $900^{\circ}C$ was fabricated at the substrate temperature of $T_s/T_m$ higher than 0.4. The smoother surface was proved to give the better film quality. Precise control of heating and cooling rate of the anode substrate was necessary to obtain a very dense YSZ electrolyte with high thermal stability, which affords to survive after post heat treatment for fabrication a cathode layer on it as well as after long time operation of solid oxide fuel cell at high temperature.

Keywords

References

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