Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effect of Post-Annealing on the Microstructure and Electrical Properties of PMN-PZT Films Prepared by Aerosol Deposition Process

후열처리 공정이 에어로졸 증착법에 의해 제조된 PMN-PZT 막의 미세구조와 전기적 특성에 미치는 영향

  • Hahn, Byung-Dong (Department of Future Technology, Korea Institute of Machinery and Materials) ;
  • Ko, Kwang-Ho (Division of Materials Science and Engineering, Pukyong National University) ;
  • Park, Dong-Soo (Department of Future Technology, Korea Institute of Machinery and Materials) ;
  • Choi, Jong-Jin (Department of Future Technology, Korea Institute of Machinery and Materials) ;
  • Yoon, Woon-Ha (Department of Future Technology, Korea Institute of Machinery and Materials) ;
  • Park, Chan (Division of Materials Science and Engineering, Pukyong National University) ;
  • Kim, Doh-Yeon (School of Materials Science and Engineering, Seoul National University)
  • 한병동 (한국기계연구원 재료기술연구소 미래기술연구부) ;
  • 고관호 (부경대학교 신소재공학부) ;
  • 박동수 (한국기계연구원 재료기술연구소 미래기술연구부) ;
  • 최종진 (한국기계연구원 재료기술연구소 미래기술연구부) ;
  • 윤운하 (한국기계연구원 재료기술연구소 미래기술연구부) ;
  • 박찬 (부경대학교 신소재공학부) ;
  • 김도연 (서울대학교 재료공학부)
  • Published : 2006.02.01
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Abstract

PMN-PZT films with thickness of $5\;{\mu}m$ were deposited on $Pt/Ti/SiO_2/Si$ substrate at room temperature using aerosol deposition process. The films showed fairly dense microstructure without any crack. XRD and TEM analysis revealed that the films consisted of randomly oriented nanocrystalline and amorphous phases. Post-annealing process was employed to induce crystallization and grain growth of the as-deposited films and to improve the electrical properties. The annealed film showed markedly improved electrical properties in comparison with as-deposited film. The film after annealing at $700^{\circ}C$ for 1h exhibited the best electrical properties. Dielectric constant $(\varepsilon_r)$, remanent polarization $(P_r)$ and piezoelectric constant $(d_{33})$ were 1050, $13\;{\mu}C/cm^2$ and 120 pC/N, respectively.

Keywords

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