Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Periodically domain inversion and optical properties of low-loss Ti : $LiNbO_3$ waveguides

저손실 Ti : $LiNbO_3$ 광도파로의 주기적 분극 반전과 광학특성

  • Yang, W.S. (Nano Bio-photonics Team, Korea Electronics Technology Institute) ;
  • Kwon, S.W. (Department of Materials Engineering, Hankuk Aviation University) ;
  • Lee, H.M. (Nano Bio-photonics Team, Korea Electronics Technology Institute) ;
  • Kim, W.K. (Nano Bio-photonics Team, Korea Electronics Technology Institute) ;
  • Yoon, D.H. (Department of Advanced Materials Engineering, Sungkyunkwan University) ;
  • Lee, H.Y. (Nano Bio-photonics Team, Korea Electronics Technology Institute)
  • 양우석 (전자부품연구원 나노바이오포토닉스팀) ;
  • 권순우 (항공대학교 항공재료학과) ;
  • 이형만 (전자부품연구원 나노바이오포토닉스팀) ;
  • 김우경 (전자부품연구원 나노바이오포토닉스팀) ;
  • 윤대호 (성균관대학교 신소재공학과) ;
  • 이한영 (전자부품연구원 나노바이오포토닉스팀)
  • Published : 2006.04.30
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Abstract

Periodic electric field assisted poling low loss (${\sim}0.1dB/cm$) single-mode Ti-diffused waveguides in $LiNbO_3$ has been achieved using a periodically patterned electrode on the +Z surface of Ti : $LiNbO_3$ crystal and homogeneous LiCl solution. Using selective chemical etching, we confirmed the periodic (${\sim}16{\mu}m$) domain inverted structure and measured SH (second harmonic) properties of fabricated periodically poled Ti : $LiNbO_3$ waveguides.

저손실 Ti:$LiNbO_3$ 광도파로 기판에 외부전계 인가법을 사용하여 주기적으로 도메인을 반전시켰다. $LiNbO_3$의 -Z 면에 Ti 패턴 형성 후 약 $1060^{\circ}C$에서 열처리 과정을 통해 광도파로를 형성하였으며, 제작된 광도파로의 광전송 손실은 ${\sim}0.1dB/cm$ 였다. 도메인 반전을 위해 +Z면에 주기적인 전극 패턴을 형성하였으며, 외부전계의 균일한 인가를 위해 LiCl 전해 용액을 사용하여 도메인을 반전 시켰다. 선택적 화학식각을 통해, 약 $16{\mu}m$의 도메인 반전 주기를 확인 할 수 있었으며, 주기적 도메인 반전구조를 갖는 Ti : $LiNbO_3$ 도파로의 비선형 특성을 측정하였다.

Keywords

References

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