한국수소및신에너지학회논문집 (Transactions of the Korean hydrogen and new energy society)

  • 제17권1호
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  • Pages.69-74
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  • 2006
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  • 1738-7264(pISSN)
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  • 2288-7407(eISSN)
한국수소및신에너지학회 (The Korean Hydrogen and New Energy Society)
권호 표지

스크린 프린팅 기법을 이용한 $SnO_2-Ag_2O-PtO_x$계 반도체식 마이크로 수소 가스센서에 관한 연구

Semiconductor type micro gas sensor for $H_2$ detection using a $SnO_2-Ag_2O-PtO_x$ system by screen printing technique

  • 김일진 (충남대학교 대학원 전자공학과) ;
  • 한상도 (한국에너지기술연구원 광전기소재연구센터) ;
  • 이희덕 (충남대학교 대학원 전자공학과) ;
  • 왕진석 (충남대학교 대학원 전자공학과)
  • 발행 : 2006.03.15
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초록

Thick film $H_2$ sensors were fabricated using $SnO_2$ loaded with $Ag_2O$ and $PtO_x$. The composition that gave the highest sensitivity for $H_2$ was in the weight% ratio of $SnO_2 : PtO_x : Ag_2O$ as 93 : 1 : 6. The nano-crystalline powders of $SnO_2$ synthesized by sol-gel method were screen printed with $Ag_2O$ and $PtO_x$ on alumina substrates. The fabricated sensors were tested against gases like $H_2$, $CH_4$, $C_3H_8$, $C_2H_5OH$ and $SO_2$. The composite material was found sensitive against $H_2$ at the working temperature $130^{\circ}C$, with minor interference of other gases. The $H_2$ gas as low as 100 ppm can be detected by the present fabricated sensors. It was found that the sensors based on $SnO_2-Ag_2O-PtO_x$ system exhibited the high performance, high selectivity and very short response time to $H_2$ at ppm level. These characteristics make the sensor to be a promising candidate for detecting low concentrations of $H_2$.

키워드

참고문헌

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