Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Characterization of TiAlN Coated Layer with Heat Treatment Prepared by R.F Magnetron Sputtering

R.F magnetron sputtering법으로 제조된 TiAlN 코팅 층의 열처리 특성

  • Song, Dong Hwan (Department of Advanced Materials Engineering, Chosun University) ;
  • Yang, Gwon Seung (Department of Advanced Materials Engineering, Chosun University) ;
  • Lee, Jong Kook (Department of Advanced Materials Engineering, Chosun University)
  • 송동환 (조선대학교 공과대학 신소재공학과) ;
  • 양권승 (조선대학교 공과대학 신소재공학과) ;
  • 이종국 (조선대학교 공과대학 신소재공학과)
  • Received : 2006.07.17
  • Accepted : 2006.07.25
  • Published : 2006.07.30
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Abstract

TiAlN coatings are available in various industry fields as a wear resistant coating for high-speed machining, due to its high hardness, excellent oxidation and corrosion resistance. The corrosion resistance of TiAlN multilayer coatings is better than that of single TiN coatings. Most of TiAlN coated layers were formed by heat treatment of coating layers with a non-stoichiometric $Ti_xAl_{1-x}N$. In this study, TiAlN coated layer was prepared by R.F magnetron sputtering and investigated the thermal behavior for heat treatment at various temperature in tube furnace. The formation of large particles with porous microstructure and phase change from HCP to FCC were observed on coated layer during heat treatment over $850^{\circ}C$ and it reduced the corrosion resistance of coated TiAlN layers.

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References

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