Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Micromachining Characteristics inside Transparent Materials using Femtoseocond Laser Pulses

펨토초 레이저에 의한 투명 유리내부 미세가공특성

  • 남기곤 (한국기계연구원 나노공정장비연구센터) ;
  • 조성학 (한국기계연구원 나노공정장비연구센터) ;
  • 장원석 (한국기계연구원 나노공정장비연구센터) ;
  • 나석주 (한국과학기술원 기계공학과) ;
  • 황경현 (한국기계연구원 나노공정장비연구센터) ;
  • 김재구 (한국기계연구원 나노공정장비연구센터)
  • Published : 2006.05.01
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Abstract

Transparent materials are widely used in the fields of optic parts and bio industry. We have experiment to find out the characteristics of the micromachining inside transparent materials using femtosecond laser pulses. With its non-linear effects by very high peak intensity, filament (plasma channel) was formed by the cause of the self-focusing and the self-defocusing. Physical damage could be found when the intensity is high enough to give rise to the thermal stress or evaporation. At the vicinity of the power which makes the visible damage or modification, the structural modification occurs with the slow scanning speed. According to the polarization direction to the scanning direction, the filament quality is quite different. There is a good quality when the polarization direction is parallel to the scanning direction. For fine filament, we could suggest the conditions of the high numerical aperture lens, the short shift of focusing point, the low scanning speed and the low power below 20 mW. As the examples of optics parts, we fabricated the fresnel zone plate with the $225{\mu}m$ diameter and Y-bend optical wave guide with the $5{\mu}m$ width.

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References

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