Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Design of an Electrostatic 2-axis MEMS Stage having Large Area Platform for Probe-based Storage Devices

대면적 플랫폼을 갖는 Probe-based Storage Device(PSD)용 정전형 2축 MEMS 스테이지의 설계

  • 정일진 (울산대대학원 기계자동차공학과) ;
  • 전종업 (울산대학교 기계자동차공학부)
  • Published : 2006.06.01
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Abstract

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

Keywords

References

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