International Journal of Precision Engineering and Manufacturing

  • 제7권3호
  • /
  • Pages.60-65
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  • 2006
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Design of a Cylindrical Flexure Jointed Stewart Platform for Aligning the Condenser in an X-ray Microscope

  • 발행 : 2006.07.01
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초록

This paper proposes a new type of six degree-of-freedom fine positioner that can be used to align the condenser in X-ray microscopy precisely. The new concept was based on the requirements for an X-ray microscope. A proposed modeling method was used to obtain an optimal design, which was verified with a finite element analysis. The fine positioner was then constructed and an experiment was used to validate its performance.

키워드

참고문헌

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