The Transactions of the Korean Institute of Electrical Engineers B (대한전기학회논문지:전기기기및에너지변환시스템부문B)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of a Non-contacting Capacitive Sensor Based on Thompson-Lampard Theorem for Measurement of ${\mu}m-order$ Displacements

Thompson-Lampard 정리를 적용한 마이크로미터 변위 측정을 위한 비접촉식 전기용량 센서 개발

  • 김한준 (한국표준과학연구원 기반표준부) ;
  • 강전홍 (한국표준과학연구원 기반표준부) ;
  • 한상옥 (충남대학교 공대 전기공학과)
  • Published : 2006.09.01
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Abstract

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

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References

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