Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers for Surface-profile Metrology

펨토초 레이저를 이용한 형상 측정용 비동일 광경로 저결 맞음 간섭계

  • 오정석 (한국기계연구원 지능기계연구센터) ;
  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2006.09.01
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Abstract

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

Keywords

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