Abstract
An accurate mathematical model for complex stiffness of the pneumatic spring would be necessary for an efficient design of a pneumatic spring used in vibration isolation tables for precision instruments such as optical devices or nano-scale equipments. A diaphragm, often employed for prevention of air leakage, plays a significant role of complex stiffness element as well as the pressurized air itself Therefore, effects of the diaphragm need to be included in the dynamic model for a more faithful description of dynamic behavior of pneumatic spring. But the complex stiffness of diaphragm is difficult to predict In an analytical way, since it is a rubber membrane of complicated shape in itself. Moreover, the diaphragm should be expandable in response to pressurization inside a chamber, which makes direct measurement of complex stiffness of diaphragm extremely difficult. In our earlier research, the complex stiffness of diaphragm was indirectly measured, which was just to eliminate the theoretical stiffness of pressurized air from the measured complex stiffness of the pneumatic spring. In order to reflect complex stiffness of inflated diaphragm on the total stiffness at the initial design or design improvement stage, however. it is required to be able to predict beforehand. In this paper, how to predict the complex stiffness of inflated rubber diaphragm by commercial FE codes (e.g. ABAQUS) will be discussed and the results will be compared with the indirectly measured values.
