Journal of the Korea Institute of Information and Communication Engineering (한국정보통신학회논문지)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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A Dual Micro Gas Sensor Array with Nano Sized $SnO_2$ Thin Film

나노 박막을 이용한 듀얼 $SnO_2$ 마이크로 가스센서 어레이

  • 정완영 (동서대학교 컴퓨터정보공학부)
  • Published : 2006.09.01
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Abstract

A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

나노입자 크기를 가진 얇은 $SnO_2$ 박막을 이용하여 CO 및 $H_2S$에 대한 우수한 감도를 가지는 복합 마이크로 가스센서 어레이를 제작하였다. 나노입자의 박막을 만들기 위해서 약 $2500{\AA}$ 두께의 $SnO_2,\;SnO_2(+Pt),\;SnO_2(+CuO)$ 막을 셰도우마스크를 사용하여 형성 한 후, 이를 $600{\sim}800^{\circ}C$의 온도에서 산화하므로서 나노입자의 $SnO_2$ 모물질의 가스감지 박막을 형성하였다. 실리콘 기판의 마이크로센서의 형태로 제작된 $SnO_2(Pt)$ 및 $SnO_2(+CuO)$ 가스센서는 각각 CO 및 $H_2S$ 가스에 대한 매우 우수한 감도를 나타내는 것을 확인하였다.

Keywords

References

  1. N. Yamazoe, N. Miura, in: S. Yamauchi(ed.), Chemical Sensor Technology Vol.4, Kodansa, Tokyo, pp.19-42, 1993
  2. M. Ando, S. Suto, T. Suzuki, T. Tsuchida, C. Nakayama, N. Miura, N. Yamazoe, $H_{2}S$-sensitive thin film fabricated from hydrothermally synthesized $SnO_{2}$ sol, J. Mater. Chem., Vol.4(4), pp.631-633, 1994 https://doi.org/10.1039/jm9940400631
  3. J. S. Suehle, R.E. Cavicchi, M. Gaitan and S, Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing, IEEE Electron Device Letters, Vol.14, pp.118-120, 1993 https://doi.org/10.1109/55.215130
  4. V. Demarne and A. Grisel, A new $SnO_{2}$ low power temperature deposition technique for integrated gas sensors, Sensors and Actuators B, Vol.15-16, pp.63-67, 1993
  5. Wan-Young Chung, Jun-Woo Lim, Duk-Dong Lee, Norio Miura, Noboru Yamazoe, Thermal and gas-sensing properties of planar-type micro gas sensor, sensor and Actuators B, Vol.64, pp.118-123, 2000 https://doi.org/10.1016/S0925-4005(99)00493-1
  6. Wan-Young Chung and Jun-Woo Lim, Patterning of Thin Tin Oxide Films with Nano-Size Particle for 2-Dimensional Micro Gas Sensor Array, Current Applied Physics, Vol.3, pp.413-416, 2003 https://doi.org/10.1016/S1567-1739(03)00103-2
  7. Wan-Young Chung, Yun-Soo Lee and Duk-Dong Lee, Indium Oxide Thin Film Sensor by Sol-Gel Method for Ozone Monitoring, J. of Materials Science Letters, Vol.22, pp.907-909, 2003 https://doi.org/10.1023/A:1024439509733
  8. W.-Y. Chung, C.-H. Shim, S.-D. Choi and D.-D. Lee, Tin oxide micro sensor for LPG Monitoring, Sensors and Actuators B, Vol.20, pp.139-143, 1994 https://doi.org/10.1016/0925-4005(94)01173-7