The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study on the Sputtering System Using Ion Plating Technique

이온 플레이팅 응용 스퍼터링 장치에 관한 연구

  • Published : 2007.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, to produce sheet plasma with high density for ion plating, we designed magnetic circuit of ion plating device consisting of solenoid coil and rectangular permanent magnet. And, we analyzed the effects of the magnetic field distribution using FEM (Finite Element Methode). Additionally, we made a sputtering system including ion plating technique on the basis of the design and verified the possibility of the sheet plasma application for advanced sputter system.

Keywords

References

  1. 이두희, '플라즈마 디스플레이 패널의 기술동향', 지식재산21 (특허청), 통권 제57호, 11월 1999
  2. Young Wook Choi, and Jeehyun Kim, 'Reactive sputtering of magnesium oxide thin film for plasma display panel applications'. Thin solid films, Vol. 460, pp. 295-299, 2004 https://doi.org/10.1016/j.tsf.2004.01.066
  3. Knotek, O., Lugscheider, E., Siry, C.W., 'Tribological properties of B-C thin films deposited by magnetron-sputter-ion plating method', Surface & coatings technology, Vol. 91, No. 3, pp. 167-173, 1997 https://doi.org/10.1016/S0257-8972(96)03105-2
  4. Kablov, E.N., Muboyadjyan, S.A., Budenovskiy, S.A., Yagodkin, Y.D., Pastuhov, K.M., 'Influence of deposition regimes on structure of ion-plated coatings', Surface & coatings technology, Vol. 93, No. 2/3, pp. 335-338, 1997 https://doi.org/10.1016/S0257-8972(97)00071-6
  5. Mattox, D.M., 'Ion plating - past, present and future', Surface & coatings technology, Vol. 133/134, pp. 517-521, 2000 https://doi.org/10.1016/S0257-8972(00)00922-1
  6. Sugimura, H., Sato, Y., Ando, Y., Tajima, N., Takai, O., 'Electron field emission from thin films of amorphous carbon nitride synthesized by arc ion plating', Thin solid films, Vol. 407 No. 1/2, pp. 104-108, 2002 https://doi.org/10.1016/S0040-6090(02)00020-2
  7. 補本 上進, '大面積 イオンプレーテイングのための高效率 シートプラズマ', 眞空, 第 25 券 11 號, pp. 719-726, 1982
  8. Souji Komiya and Kazuyuki Tsuruoka, 'Production and Measurement of Dense Metal Ions for Physical Vapor Deposition by a Hollow Cathode Discharge', Proc. 6th Internl. Vacuum Congr., J. Appl. Phys. Suppl, 2, Pt.1, pp. 415-418, 1974