한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

펨토초 레이저를 이용한 OLED 용 Shadow Mask Invar 합금의 어블레이션

Femtosecond Pulsed Laser Ablation of OLED Shadow Mask Invar Alloy

  • 정일영 (인하대학교 기계공학과 대학원) ;
  • 강경호 (인하대학교 기계공학과 대학원) ;
  • 김재도 (인하대학교 기계공학과) ;
  • 손익부 (광주과학기술원 고등광기술연구소) ;
  • 노영철 (광주과학기술원 고등광기술연구소) ;
  • 이종민 (광주과학기술원 고등광기술연구소)
  • 발행 : 2007.12.01
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초록

Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.

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참고문헌

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