마이크로광조형에서 고 세장비 구조물 집적화 가공을 위한 UV 경화성 수지의 물성 개선

Improvement of Mechanical Properties of UV-curable Resin for High-aspect Ratio Microstructures Fabricated in Microstereolithography

  • 이수도 (부산대학교 대학원 지능기계공학부) ;
  • 최재원 (부산대학교 기계기술연구소) ;
  • 박인백 (부산대학교 대학원 지능기계공학부) ;
  • 하창식 (부산대학교 고분자공학과) ;
  • 이석희 (부산대학교 기계공학부)
  • 발행 : 2007.12.01

초록

Recently, microstructures fabricated using microstereolithography technology have been used in the biological, medical and mechanical fields. Microstereolithography can fabricate real 3D microstructures with fine features, although there is presently a limited number of materials available for use in the process. Deformation of the fine features on a fabricated microstructure remains a critical issue for successful part fabrication, and part deformation can occur during rinsing or during fabrication as a result of fluid flow forces that occur during movement of mechanical parts of the system. Deformation can result in failure to fabricate a particular feature by breaking the feature completely, spatial deflection of the feature, or attaching the feature to neighboring microstructures. To improve mechanical strength of fabricated microstructures, a clay nanocomposite can be used. In particular, a high-aspect ratio microstructure can be fabricated without distortion using photocurable liquid resin containing a clay nanocomposite. In this paper, a clay nanocomposite was blended with a photocurable liquid resin to solve the deformation problem that occurs during fabrication and rinsing. An optimal mixture ratio of a clay nanocomposite was found through tensile testing and the minimal allowable distance between microstructures was found through fabrication experimentation. Finally, using these results, high-aspect ratio microstructures were fabricated using a clay nanocomposite resin without distortion.

키워드

참고문헌

  1. Bertsch, A., Bernhard, P. and Renaud, P., 'Micro stereolithography: Concepts and applications,' 8th IEEE International Conference on Emerging Technologies and Factory Automation, pp. 289-298, 2001
  2. Bertsch, A., Bernhard, P., Vogt, C. and Renaud, P., 'Rapid prototyping of small size objects,' Rapid Prototyping Journal, Vol. 6, No.4, pp. 259-266, 2000 https://doi.org/10.1108/13552540010373362
  3. Kang, H. W., Lee, I. H. and Cho, D. W., 'Development of an Assembly-free Process Based on Virtual Environment for Fabricating 3DMicrofluidic Systems Using Micro stereolithography Technology,' Journal of Manufacturing Science and Engineering, Vol. 126, Issue 4, pp. 766-771, 2004 https://doi.org/10.1115/1.1811116
  4. Maruo, S. and Ikuta, K., 'Submicron stereolithography for the production of freely movable mechanics by using single-photon polymerization,' Sensors and Actuators A, Vol. 100, No. 1, pp. 70-76, 2002 https://doi.org/10.1016/S0924-4247(02)00043-2
  5. Wu, D. M., 'Micro Fabrication of 3D Structures and Characterization of Molecular Machine,' Ph. D. Dissertation, UCLA, 2005
  6. Carlos, H. M. and Charles, H. H., 'Mechanical Stability and Adhesion of Microstructures Under Capillary Forces-Part I: Basic Theory,' Journal of Microelectromechanical Systems, Vol. 2, No. 1, pp. 33-43, 1993 https://doi.org/10.1109/84.232593
  7. Carlos, H. M. and Charles, H. H., 'Mechanical Stability and Adhesion of Microstructures Under Capillary Forces-Part I: Experiments,' Journal of Microelectromechanical Systems, Vol. 2, No. 1, pp. 44-55, 1993 https://doi.org/10.1109/84.232594
  8. Hwang, S. H. and Song, J. T., 'An effective method to prevent stiction problems using a photoresist sacrificial layer,' Journal of Micromechanics and Microengineering, Vol. 17, No. 2, pp. 245-249, 2007 https://doi.org/10.1088/0960-1317/17/2/009
  9. Lucas, S., Kis-Sion, K., Pinel, J. and Bonnaud, O., 'Polysilicon cantilever beam using surface micromachining technology or application in micro switches,' Journal of Micromechanical and Microengineering, Vol. 7, No. 3, pp. 159-161, 1997 https://doi.org/10.1088/0960-1317/7/3/021
  10. Zeng, Q. H., Yu, A. B., Lu, G. Q. and Paul, D. R., 'Clay-Based Polymer Nanocomposites: Research and Commercial Development,' Journal of Nanoscience and Nanotechnology, Vol. 5, No. 10, pp. 1574-1592, 2005 https://doi.org/10.1166/jnn.2005.411
  11. Liu, X. and Wu, Q., 'Polyamide 66/Clay Nano composites via Melt Intercalation,' Macromorecular Materials and Engineering, Vol. 287, No. 3, pp.180-186, 2002 https://doi.org/10.1002/1439-2054(20020301)287:3<180::AID-MAME180>3.0.CO;2-T
  12. Sheng, N., Boyce, M. C., Parks, D. M., Rutledge, G. C., Abes, J. I. and Cohen, R. E., 'Multiscale micromechanical modeling of polymer/clay nano composites and the effective clay particle,' Journal of Polymer, Vol. 45, No. 2, pp. 487-506, 2004 https://doi.org/10.1016/j.polymer.2003.10.100
  13. Choi, J. W., Ha, Y. M. and Lee, S. H., 'Fabrication of Microstructure Array using the Projection Microstereolithography System,' Journal of KSPE, Vol. 24, No. 8, pp. 138-143, 2007
  14. Choi, J. W., 'Development of Projection-based Microstereolithography Apparatus Adapted to Large Surface and Microstructure Fabrication for Human Body Application,' Ph. D. Dissertation, PNU, 2007