Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Contact Print Lithography for Precise Transplantation of Three-dimensional Microstructures into a Microsystem

표면접촉 인쇄방식을 이용한 극미세 3차원 형상의 이식공정에 관한 연구

  • 박상후 (부산대학교 기계공학부) ;
  • 정준호 (한국기계연구원 나노공정장비센터) ;
  • 최대근 (한국기계연구원 나노공정장비센터) ;
  • 김기돈 (한국기계연구원 나노공정장비센터) ;
  • 알리알툰 (한국기계연구원 나노공정장비센터) ;
  • 이응숙 (한국기계연구원 나노공정장비센터) ;
  • 양동열 (한국과학기술원 기계공학과) ;
  • 공홍진 (한국과학기술원 물리학과) ;
  • 이광섭 (한남대학교 생명정보신소재공학과)
  • Published : 2007.12.01
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Abstract

Precise fabrication of three-dimensional (3D) self-standing microstructures on thin glass plates via two-photon induced polymerization (TPP) has been an important issue for innovative 3D nanodevices and microdevices. However, there are still issues remaining to be solved, such as building 3D microstructures on opaque materials via TPP and being able to implant them as functional parts onto practical systems. To settle these issues simply and effectively, we propose a contact print lithography (CPL) method using an ultraviolet (UV)-curable polymer layer. We report some of the possibilities and potential of CPL by presenting our results for transplanting 3D microstructures onto large-area substrates and also our examination of some of the effects of the process parameters on successful transplantation.

Keywords

References

  1. Sun, H. B., Takada, K. and Kawata, S., 'Scaling Laws of Voxels in Two-photon Photopolymerization Nanofabrication,' Appl. Phys. Lett., Vol. 83, No. 6, pp. 1104-1106, 2003 https://doi.org/10.1063/1.1599968
  2. Park, S. H., Lim, T. W., Yang, D. Y. and Kong, H. J., 'Directly Nano-precision Feature Patterning on Thin metal Layer using Top-down Building Approach in nRP Process,' J. KSPE, Vol. 21, No. 6, pp. 153-159, 2004
  3. Park, S. H., Jeong, J. H., Lim, T. W., Yang, D. Y., Kim, K. D., Lee, K. S. and Kong, H. J., 'Effective Fabrication of Three-dimensional Nano/micro-structures in a Single Step,' Appl. Phys. Lett., Vol. 88, No. 203105, 2006 https://doi.org/10.1063/1.2204448
  4. Lim, T. W., Park, S. H., Yang, D. Y., Kong, H. J. and Lee, K. S., 'Direct Single-layered Fabrication of 3D Concavo-convex Patterns in Nano-stereolithography,' Appl. Phys. A, Vol. 84, No. 4 , pp. 379-383, 2006 https://doi.org/10.1007/s00339-006-3633-x
  5. Park, S. H., Lim, T. W., Yang, D. Y., Kong, H. J. and Lee, K. S., 'Direct Laser Patterning on Opaque Substrate in Two-photon Polymerization,' Macromol. Res., Vol. 14, No. 2, pp. 245-250, 2006 https://doi.org/10.1007/BF03218517
  6. Park, S. H., Lee, S. H., Yang, D. Y., Kong, H. J. and Lee, K. S., 'Subregional Slicing Method to Increase 3D Nanofabrication Efficiency in Two-photon Polymerization,' Appl, Phys. Lett., Vol. 87, No. 154108, 2005 https://doi.org/10.1063/1.2103393
  7. Lee, K. S., Yang, D. Y., Park, S. H. and Kim, R. H., 'Recent Developments in Two-photon Polymerization for 2D and 3D Microfabrications,' Polym. Advan. Technol., Vol. 17, Issue 2, pp. 72-82, 2006 https://doi.org/10.1002/pat.664
  8. Pham, A. T., Lim, T. W., Park, S. H., Yang, D. Y., Lee, K. S. and Kim, D. P., 'Three-dimensional SiCN Ceramic Structures Via Nano-stereolithography of Inorganic Polymer Photoresist,' Adv. Func. Mater., Vol. 16, No. 9, pp. 1235-1241, 2006 https://doi.org/10.1002/adfm.200600009
  9. Park, S. H., Lim, T. W., Yang, D. Y., Yi, S. W. and Kong, H. J., 'Direct Fabrication of Micro-Patterns and Three-dimensional Structures using Nano Replication Printing (nRP) Process,' Sensor. Mater., Vol. 17, No. 2, pp. 65-75, 2005
  10. Park, S. H., Lim, T. W., Yang, D. Y., Kong, H. J., Kim, K. S. and Lee, K. S., 'Fabrication of Nano-precision PDMS Replica using Two-photon Photopolymerization and Vacuum Pressure Difference Technique,' B. Korean Chem. Soc., Vol. 25, No. 8, pp. 1119-1120, 2004 https://doi.org/10.5012/bkcs.2004.25.8.1119
  11. Yang, D. Y., Park, S. H., Lim, T. W., Kong, H. J., Yi, S. W., Yang, H. K. and Lee, K. S., 'The smallest reproduction of three-dimensional artistic sculpture by multi-path scanning method with considering pattern collapse,' Appl. Phys. Lett., Vol. 90, No. 079903, 2007 https://doi.org/10.1063/1.2692435