IEMEK Journal of Embedded Systems and Applications (대한임베디드공학회논문지)

Institute of Embedded Engineering of Korea (대한임베디드공학회)
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Design and Fabrication of a Micro Gas Sensor Using Nano Sensing Materials on Multi-layer Type Micro Platform with Low Power Consumption

마이크로 플랫폼 상에 나노 감지 재료를 이용한 저전력 NOX 센서의 설계 및 제조

  • 박상일 (한국항공대학교 항공재료공학과, 전자부품 연구원 나노메카트로닉스연구센터) ;
  • 박준식 (전자부품연구원 나노메카트 로닉스연구센터) ;
  • 이민호 (전자부품연구원 나노메카트 로닉스연구센터) ;
  • 박광범 (전자부품연구원 나노메카트 로닉스연구센터) ;
  • 김성동 (전자부품연구원 유비쿼터스컴퓨팅 연구센터) ;
  • 박효덕 (전자부품연구원 나노융합본부) ;
  • 이인규 (한국항공대학교 항공재료공학과)
  • Received : 2007.06.05
  • Accepted : 2007.08.07
  • Published : 2007.06.30
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Abstract

A novel multi-layer type micro gas sensor for $NO_X$ detection was designed and fabricated. Micro platform defined as type II-1 in this article for micro gas sensor was fabricated using the MEMS technology to meet the demanding needs of lower power consumption. Nano composite materials were fabricated with nanosized tin oxide powder and $\underline{m}$ulti-$\underline{w}$all $\underline{c}$arbon $\underline{n}$ano $\underline{t}$ube (MWCNT) to improve sensitivity. We investigated characteristics of fabricated multi-layer type micro gas sensor with $NO_2$ concentration variations at constant 2.2 V. Sensitivity (S) of micro gas sensor were observed to increase from 2.9, to 7.4 and 11.2 as concentrations of $NO_2$ gases increased from 2.4 ppm, to 3.6 ppm and 4.9 ppm. When 2.4 ppm of $NO_2$ gas was applied, response time and recovery time of micro gas sensor were recorded as 101 seconds and 142 seconds, respectively.

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