Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Capacitance Properties of Nano-Structure Controlled Alumina on Polymer Substrate

폴리머 기판위에 형성된 나노구조제어 알루미나의 캐패시터 특성

  • 정승원 (한국과학기술연구원 박막재료연구센터) ;
  • 민형섭 (한국과학기술연구원 박막재료연구센터) ;
  • 한정환 (인하대학교 신소재공학부) ;
  • 이전국 (한국과학기술연구원 박막재료연구센터)
  • Published : 2007.02.27
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Abstract

Embedded capacitor technology can improve electrical perfomance and reduce assembly cost compared with traditional discrete capacitor technology. To improve the capacitance density of the $Al_2O_3$ based embedded capacitor on Cu cladded fiber reinforced plastics (FR-4), the specific surface area of the $Al_2O_3$ thin films was enlarged and their surface morphologies were controlled by anodization process parameters. From I-V characteristics, it was found that breakdown voltage and leakage current were 23 V and $1{\times}10^{-6}A/cm^2$ at 3.3 V, respectively. We have also measured C-V characteristics of $Pt/Al_2O_3/Al/Ti$ structure on CU/FR4. The capacitance density was $300nF/cm^2$ and the dielectric loss was 0.04. This nano-porous $Al_2O_3$ is a good material candidate for the embedded capacitor application for electronic products.

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