International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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An Ultraprecise Machining System with a Hexapod Device to Measure Six-Degree-Of-Freedom Relative Motions Between The Tool And Workpiece

  • Oiwa, Takaaki (Department of Mechanical Engineering, Shizuoka University)
  • Published : 2007.04.01
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Abstract

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

Keywords

References

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